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Committed to the development and
production of high-quality slot
die coating equipment
Product Center
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Solution Precision Film Forming Applications
Application Area

Slot Die Coater (SDC) is one of the core process equipment in the fields of flat panel display, advanced packaging, thin-film solar cells, flexible electronics, etc., with a wide range of applications and huge market demand.

Solution precision film forming applications
SPS Technology Has World Class Performance
PRECISION SYSTEMS World leading technology

SPS focuses on the design, development and manufacture of precision solution slot coating + vacuum dry baking equipment and its core components, and is the world's leading enterprise in the field of precision solution equipment.

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Coating Machine
Coating Machine
Mass production series of SPR/nDeavor

The SPR/nDeavor series of high-performance coaters are mainly used in the mass production of electronic products such as display and float flat glass, and the SPS can provide a slot coating system with excellent coating uniformity, low material consumption, high precision and strong stability, which can be suitable for Gen2 (370x470mm) to Gen10 (2880x3130mm) specification substrate processing, and can be used for larger substrates or customized substrate sizes. The SPR/nDeavor system can be equipped with an automated robot and an online conveyor mechanism for substrate loading and unloading.

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Coating Machine
Coating Machine
Pilot series of SPL/nSpire

SPL/nSpire series coating machine is mainly used to meet the requirements of the pilot test, before the formal mass production, used in LCD, photovoltaic, OLED, flexible display and a variety of organic printed electronic products, can provide good coating film uniformity, low material consumption, high precision and strong stability of the slot coating system.

The SPL/nSpire series can also be equipped with automated robots and an online conveyor for substrate loading and unloading.

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Coating Machine
Coating Machine
R&D line of SRD/nRad

The SRD/nRad series is a precision slot coating equipment for laboratory use. It stands just on a very small area, low cost, and is specially designed for R&D in the early stage of industrialization. The SRD series has a similar mechanical and electrical design to that of mass production equipment, except for the size difference.

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Perovskite/Si Tandem Coating Equipment
Perovskite/Si Tandem Coating Equipment
SRD300T-M10

SRD300T-M10 Series Slot Die Coating Equipment is a new generation of coating equipment developed by SPS, which can be used for coating Perovskite/Si tandem solar cells. The equipment adopts the vacuum chuck to adsorb the substrate and distributes material through the gantry movement, high-precision liquid-supply pump and high-precision die head, which can realize the precision coating of various materials. Equipment can be customized to meet customers' needs for different wafer sizes and combinations, providing the best combination of flexibility and economy.

SPS’s high-precision slot die coating equipment has good coating uniformity, less material consumption, running fast, and is widely used in the research and development of high-precision coating films for perovskite solar energy, semiconductors, flexible electronics, and other fields.

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Semiconductor Advanced Packaging Coating Equipment
Semiconductor Advanced Packaging Coating Equipment

Slot die coating equipment needs to be perfectly compatible with complex materials and high-precision control processes. Panel-level packaging technology is particularly good at handling large-size, multi-functional system integration products, and the cost of its typical products is reduced by more than 20 percent compared to the wafer-level. SPS has been developing in this area for many years, working closely with top companies in the industry, and has rare practical delivery experience.

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Key Components
Coating head/Air knife
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Key Components
Moving platform
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Key Components
Bubble removal system
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Key Components
Fluid supply pump
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Vacuum Drying & Annealing
Vacuum drying

SPS vacuum drying equipment is a new generation of laboratory vacuum drying equipment, which can is applicable to various substrates. The equipment uses a dry pump to pump air from the vacuum chamber, and through the cooperation of various valve units, it can realize the precision vacuum drying of a variety of materials. The overall drying uniformity of the equipment is good, fast and stable, and it is widely used in the experimental high-precision coating film drying production in the fields of solar energy, flat panel display, flexible electronics and so on.

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Vacuum Drying & Annealing
Annealing

Multi-layer hot plate is a new generation of SPS R&D annealing equipment, which can be used for drying or annealing the wet film of various substrates, and is widely used in solar energy, flat panel display, flexible electronics and other fields.

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Automation Integration
Automation Integration
Automated integration
Automation integration and control systems

SPS Shanghai can carry out coating process and whole line automation services, integrate upstream and downstream equipment.

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Perovskite Cell Manufacturing
Turnkey Solution
Automation Integration
The whole line of equipment includes:
  • Thermal evaporation coating equipment
    C60, BCP, etc
  • Magnetron sputtering
    NiO/ITO/Cu, etc
  • Laser scribing
    P1/P2/P3
  • Laser edge clearing
    P4
  • Slit coating
    Perovskite/passivation layer
  • Atomic layer deposition
    Sno2
  • PL/EL/IV test system
  • Automated systems
    (Optional)
  • Washing machine
  • HP/CP
  • VCD
  • Laminators
Adapter structure
  • NIP structure
    Examples: FTO/Sn02/Perovskite/Spiro-OMeTAD/Ag
  • PIN structure
    For example: FTO/NiOx/Perovskite/C60/BCP/Cu
Adapt to the route
  • Adapt to the route
    Full wet process; Mixed dry/wet process
Substrate size
  • Substrate size
    300x300mm,450x650mm,600x1200mm,1200x2400mm, etc
Production cycle
  • Production cycle
    10min/piece (manual); 60s/piece (fully automatic)
Substrate size process package
  • Substrate size process package
    PCE≥16%
Equipment Display
Coating Machine

SPRI focuses on the research and development of automation integration technology of perovskite equipment, the manufacturing of supporting equipment and parts, and the three-dimensional construction of perovskite research institute platform.

Suzhou Precision System, Inc.
  • Tel: 0512-52066088
  • Business: info@sps-china.cn
  • Investor: ir@sps-china.cn
  • Recruitment: hr@sps-china.cn
  • Address: Building6, No.58 Tonggang Road, Bixi Street, Changshu Economic and Technological Development Zone, Suzhou
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