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Product parameters
Product Parameters
ltem Specification
HP temperature The heater sets the temperature:Max.250°C
Hot air setting temperature:Max.250°C
Substrate surface temperature uniformity ±3℃ (Measured at 200C)
Temperature measurement method 9 point, 10mm from the edge of the glass
Proximity Pin height 0.3mm
Hot plate size G2.5~G10
Hot air Hot air infusion
Lift-pin Lifting Servo motor control
Lift-pin Material

Body: stainless steel;

top:Polyamide-imide

Chamber Material Stainless steel
Chamber Lifting Cylindar
HP Chamber maintenance Flip-up lid with pull-out structure drawer

 

 

Item Specification
CP temperature 23±2℃
Temperature measuring method 9 points, distance to edge 10mm
Cold plate size G2.5~G10
Cooling method Adsorption cooling (cooling water provided by customers)
Lift-pin lifting Servo motor control
Lift-pin material

Main body:stainless steel;

Polyamide-imide

lonizer optional
Chamber material Stainless steel
Chamber lifting Cylindar
CP chamber maintenance Pull-out construction, drawer