在高精密涂布和更广泛领域成为世界级头部企业。
ltem | Specification | ||
HP temperature | The heater sets the temperature:Max.250°C Hot air setting temperature:Max.250°C |
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Substrate surface temperature uniformity | ±3℃ (Measured at 200C) | ||
Temperature measurement method | 9 point, 10mm from the edge of the glass | ||
Proximity Pin height | 0.3mm | ||
Hot plate size | G2.5~G10 | ||
Hot air | Hot air infusion | ||
Lift-pin Lifting | Servo motor control | ||
Lift-pin Material |
Body: stainless steel; top:Polyamide-imide |
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Chamber Material | Stainless steel | ||
Chamber Lifting | Cylindar | ||
HP Chamber maintenance | Flip-up lid with pull-out structure drawer |
Item | Specification | ||
CP temperature | 23±2℃ | ||
Temperature measuring method | 9 points, distance to edge 10mm | ||
Cold plate size | G2.5~G10 | ||
Cooling method | Adsorption cooling (cooling water provided by customers) | ||
Lift-pin lifting | Servo motor control | ||
Lift-pin material |
Main body:stainless steel; Polyamide-imide |
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lonizer | optional | ||
Chamber material | Stainless steel | ||
Chamber lifting | Cylindar | ||
CP chamber maintenance | Pull-out construction, drawer |