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    At SPS, we understand the importance of customer service. We are committed to providing customers with a professional, efficient and satisfaction-oriented service experience. Whether it is product consultation, technical support or after-sales service, we will go all out to ensure that every customer can feel our intentions and professionalism. SPS firmly believes that excellent customer service is the cornerstone of sustainable development of enterprises, and it is also the key to winning the trust and loyalty of customers.
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Product parameters
Product Parameters
Technical Specifications Standard value
SRD200/nRad SRD300/nRad2
Substrate size

standard 150*150mm, Maximum size 210x300mm

150 or 200mm Wafers

Standard 300x300mm, maximum size 370x470mm

Wafer sizes up to 300mm are available
Substrate type Glass, plastics, metal foils, silicon wafers Rigid or flexible substrates Glass, plastics, metal foils, silicon wafers Rigid or flexible substrates
Substrate thickness rigid:0.5~6mm, Flexible:>100μm rigid:0.5~6mm,Flexible:>100μm
Coating thickness range 20nm~>50μm
(Dry film, depending on material properties and system parameter settings)		 20nm~>50μm
(Dry film, depending on material properties and system parameter settings)
Film thickness consistency

Film thickness(Dry film) >150nm,±3% or better;

Film thickness(Dry film) 50~150nm,±5% or better

Film thickness(Dry film) >150nm,±3%or better;

Film thickness(Dry film)50~150nm,±5%or better
Coating start/end edges lmpact
Width*		 5~10mm or less 5~10mm or less
The viscosity range of the coating material standard1~50cp,Typically with high viscosity pumps, this is achievable to 10000cp standard1~50cp, Typically with high viscosity pumps,this is achievable to 10000cp
The amount of system fill Less than 20ml Less than 30ml
System size and weight LxWxH:911mmx780mmx878mm
weight:170kg/380lbs		 LxWxH:1307mmx941mmx921mm
weight:370kg/800lbs
Certification UL&CE UL&CE
Suzhou Precision System, Inc.
  • Tel: 0512-52066088
  • Business: info@sps-china.cn
  • Investor: ir@sps-china.cn
  • Recruitment: hr@sps-china.cn
  • Address: Building6, No.58 Tonggang Road, Bixi Street, Changshu Economic and Technological Development Zone, Suzhou
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